MICRO MANIPULATION DEVICE FOR FINE WORK AND MICRO PROBE FOR FINE WORK

摘要

PROBLEM TO BE SOLVED: To provide a micro manipulation device and a micro probe for the microfabrication of a microscope by which a processing part is precisely specified and made easy to be observed as a microscope image and extremely fine sample processing is easily executed in an optimum processing direction. ;SOLUTION: This micro manipulation device for microfabrication is constituted as follow. An inspection processing sample stage 2 which is used for placing an inspection processing sample 3 and which can be optionally moved in an X axis direction and in a Y axis direction and driven to be rotated with the optical axis A-A' of a microscope 10 as a rotation center is installed on a movable base 1 which can be optionally moved in the X axis direction and in the Y axis direction and driven to be inclined and rotated with the B-B' axis of the surface of the sample 3 as a rotation center. Besides, a manipulator base 5 on which a manipulator driving unit 7 is loaded through a manipulator base supporting body 4 and which can be driven to be rotated with the optical axis A-A' of the microscope 10 as a rotation center is installed on the base 1. Then, the probe for fine work is fitted to the tip of the unit 7.;COPYRIGHT: (C)2000,JPO