NEW CALIX ARENE DERIVATIVE AND CALIX RESORCINARENE DERIVATIVE, AND PHOTOSENSITIVE COMPOSITION

摘要

PROBLEM TO BE SOLVED: To obtain the subject derivative having acid-dissociable functional group useful as a positive-type chemical amplification-type resist material, by affording itself with a specific structure. SOLUTION: This derivative is obtained by affording itself with a structure of formula I (R1 and R2 are each H or a 1-5C alkyl; R3 is H, t-butoxycarbonyl, trimethylsilyl or cyclonexenyl, at least one of R3 s being t-butoxycarbonyl, trimethylsily or cyclohexenyl; (n) is 1-3; (m) is 4-12). Of the above derivatives,that which is suitably used as a chemical amplification-type resist material is a calix resorcinarene derivative of formula II. For example, the compound of formula I wherein R3 is a cyclohexenyl group, is obtained by reacting 3- bromocyclohexene or the like with the hydroxyl group in calix arene or calix resorcinarene.