PATTERN COMPARING METHOD, AND DEVICE FOR VISUAL INSPECTION

摘要

PROBLEM TO BE SOLVED: To conduct a comparison by double detection over all the dies of an inspected object without delay. ;SOLUTION: A pattern comparing device by double detection in which images in the same pattern regions arranged plurally in row and line directions on an inspected object 13 are image-picked up, the images of the respective picked-up regions are compared with images of two or more of adjacent other regions, and in which a defect is detected based on a compared result hereinbefore, is provided with a means 16 moving relatively on the object 13 for conducting scanning to pick up images of the regions of the inspected object 13 as a pair of both positive and negative directions in the line or row direction, a means 24 for storing temporarily the images of the image-picked-up regions, and a means 19 for comparing the stored images of the respective regions with the images of two or more of another adjacent stored regions image-picked up when moving to the same direction.;COPYRIGHT: (C)2000,JPO