ION GENERATING POWER SOURCE FOR ION SOURCE OF NEUTRAL PARTICLE INJECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide the stabilized operation while withstanding high voltage and large surge near an ion generating power source by providing a high frequency inverter in a primary side of an insulating transformer for raising the alternating current voltage to be rectified so as to obtain the high-tension direct current voltage and for insulating from the grounding electrical potential. ;SOLUTION: This ion generating power source 12 is formed of an insulating transformer 112, a step-down transformer 114, and a rectifier 116. A high frequency inverter 14 for voltage control and high-speed switching is arranged in a primary side of the insulating transformer 112 as a low electrical potential side. Desirable direct current voltage is generated in the output of the rectifier 116 by the voltage control such as a change of control angle of the high frequency inverter 14, and supplied to an ion generating section 102. A high electrical potential side of the ion generating power source 12 is formed of only the step-down transformer 114 and the rectifier 116, and since a semiconductor switch is not included, wrong operation and breakdown of the semiconductor switch due to a large surge to be generated when a discharge breakdown is generated in an ion source 100 can be restrained. The high electrical potential side of the ion generating power source 12 can be quickly cut by switching the high frequency inverter 14.;COPYRIGHT: (C)2000,JPO