ION SOURCE ACCELERATION POWER SOURCE OF NEUTRAL PARTICLE INJECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an inexpensive and space-saving ion source acceleration power source. SOLUTION: A cooling water feeding system to an ion source is applied as a bleeder resistor instead of a conventional bleeder resistance element. A cooling water feeding-cum-bleeder resistor 12 is mechanically coupled to an ion generation part 102 for cooling the ion generation part 102 of an ion source 100, and is electrically connected in parallel with the output of a rectifier 116. Thereby, a conventional electrical resistance element as a bleeder resistor can be omitted, so that the cost of an apparatus can significantly be reduced. It can be miniaturized by installing an insulation pipe of a pure water feeding system in an insulating gas.