PRODUCTION OF BORON NITRIDE, ALUMINUM NITRIDE OR SILICON NITRIDE THROUGH COMBUSTION SYNTHESIS

摘要

PROBLEM TO BE SOLVED: To provide a production process for BN, AlN or Si3N4 of high purity that gives very fine particles of products in no need of crushing without contamination of impurities from the heating material for ignition by permitting the combustion synthesis of BN, AlN or Si3N4 in the nitrogen atmosphere under the pressure lower than the prescribed one where the combustion synthesis has been regarded to be impossible. ;SOLUTION: The combustion synthesis is initiated by irradiating the starting boron powder, aluminum powder or silicon powder with the laser of a wavelength longer than 770 nm with the output power of 0.5-500 watts in a nitrogen atmosphere under ≤10, ≤2 and ≤30 atmospheric pressure, individually, thereby producing BN, AlN or Si3N4.;COPYRIGHT: (C)2000,JPO