METHOD FOR PACKAGING MAIN BODY OF EXPOSURE DEVICE, PACKAGING STRUCTURE, AND EXPOSURE DEVICE TO BE PACKAGED BY THE METHOD AND PACKAGING STRUCTURE

摘要

PROBLEM TO BE SOLVED: To keep an optical element clean by preventing entering of impurity gas such as silicone-based or ammonium sulfate-based gas from exterior during its transportation. ;SOLUTION: An outer wall of a chamber 2 of a main body 1 of an exposure device is packaged by a first packaging layer A, and further its outer circumferential side is packaged with a second packaging layer B. The first packaging layer A is formed by an air packing 16 forming the second packing layer B and material generating lesser amount of out-gas than that of a tap sheet, for example, a sheet material 10 made of tetra-fluoroethylene.;COPYRIGHT: (C)2000,JPO