METHOD FOR EVAPORATING SPECIFIED COMPONENT FROM MULTIPLE-SUBSTANCE MIXTURE AND MULTIPLE-SUBSTANCE SYSTEM AND DEVICE THEREFOR

摘要

PROBLEM TO BE SOLVED: To obtain a high-purity product by shortening the diffusion distance and increasing the uniformity of a temp. distribution in its radial and axial directions. SOLUTION: A ring crucible 17 formed of a material acting as a susceptor for a switching electromagnetic field is used, and at least one heating element 16 or 21 formed of a material acting similarly as a susceptor for a switching electromagnetic field is arranged below the lowermost ring crucible 17 and above the uppermost ring crucible 17. The crucible 17 and heating elements 16 and 21 are placed in at lest one induction coil 8, the crucible 17 and heating elements 16 and 21 are heated by inductive coupling so that the lowermost crucible 17 and the uppermost crucible 17 are additionally heated by the heating elements 16 and 21, and the crucibles 17 are heated for such a set time that at least one specified component of the multiple-susbstance mixture or multiple- substance system is collected at a purity as high as possible.