LIGHT SOURCE FOR FLAW INSPECTION AND LIGHT SOURCE UNIT FOR FLAW INSPECTION

摘要

PROBLEM TO BE SOLVED: To illuminate an object to be inspected from the entire periphery of the side surface thereof and to perform proper inspection regardless of the direction placing the object.;SOLUTION: A quartz blank 1 is placed on a horizontal transparent mounting stand. The light emitted from a lower light source 20 constituted by arranging light emitting diodes 20A in an annular form is allowed to transmit through the mounting stand 2 obliquely from below to be concentrated to the quartz blank 1. At the same time, the light emitted from a lateral light source 21 constituted by annularly arranging light emitting diodes 21A is concentrated to the quartz blank 1 which is present at a center position from horizontal direction. The quartz blank 1 is photographed from a vertical upper part by a CCD camera 13 and the presence of a flaw is discriminated on the basis of the image thereof.;COPYRIGHT: (C)2000,JPO