DRYING PREVENTING STRUCTURE OF NOZZLE TIP PART AND COATING APPARATUS EQUIPPED THEREWITH

摘要

PROBLEM TO BE SOLVED: To provide the drying preventing structure of a nozzle tip part capable of preventing the drying of a treatment soln. at the tip part of a nozzle to prevent the concn. change or partial solidification of the treatment soln. supplied from the nozzle, and a coating apparatus equipped with this structure. ;SOLUTION: A drying preventing cap 8 is arranged in close vicinity to a nozzle 1. During the movement of the nozzle 1 from a standby spot to a coating start position and during the movement thereof from a coating completion position (a nozzle washing part in the case of washing treatment) to the standby spot, the drying preventing cap 8 is mounted on the tip part 15 of the nozzle 1 to prevent the drying of the tip part 15 of the nozzle 1.;COPYRIGHT: (C)2000,JPO