PIEZOELECTRIC ACTUATOR, INK-JET TYPE RECORDING HEAD, PRINTER, MANUFACTURE FOR PIEZOELECTRIC ACTUATOR AND MANUFACTURE FOR INK-JET TYPE RECORDING HEAD

摘要

PROBLEM TO BE SOLVED: To manufacture a piezoelectric actuator that can be a large area by forming columnar crystal grains of a piezoelectric ceramics constituting the piezoelectric actuator in a random orientation in a thicknesswise direction and setting an average particle size of the columnar crystal grains in a specific range. ;SOLUTION: An upper electrode 42 is formed with the use of an electron beam vapor deposition or the like on a piezoelectric thin layer 41 using one piezoelectric ceramics among titanate zirconate, lanthanum titanate, lanthanum zirconate, titanate zirconate magnesium niobate, or the like. The piezoelectric thin layer 41 and the upper electrode 42 are masked to conform in shape to a cavity formed in a pressure chamber substrate 20. The periphery is etched, whereby a piezoelectric actuator 40 is obtained. Columnar crystal grains of the piezoelectric actuator 40 are in a random orientation in a thicknesswise direction with an average particle size of 100-15000 nm.;COPYRIGHT: (C)2000,JPO