CALIBRATION METHOD OF ULTRA-PRECISE X-RAY DIFFRACTION APPARATUS

摘要

PROBLEM TO BE SOLVED: To calibrate an X-ray diffraction system for measuring a lattice constant highly accurately. ;SOLUTION: The Bragg angles of a plurality of diffraction surfaces are measured and a lattice constant a(θ) is calculated from the obtained Bragg angles θ, and a calibration function g(θ) wherein a real lattice constant a0 is represented by a0=a(θ)g(θ) is shown as a quaternary function of θ and the coefficient thereof is determined by the method of least squares to obtain a calibration function.;COPYRIGHT: (C)2000,JPO