SURFACE ANALYSIS METHOD OF MATERIAL IN ARBITRARY SHAPE BY ELECTRONIC PROBE MICROANALYZER

摘要

PROBLEM TO BE SOLVED: To reduce electron rays to an embedding material in a surface analysis method by an EPMA(electronic probe microanalyzer) for a sample embedding material consisting of a sample that is embedded by the embedding material. ;SOLUTION: The face analysis method of a sample in an arbitrary shape according to the EPMA is composed of a step for setting an analysis region 24 of a sample embedding body 23 that is made of a sample 21 embedded by an embedding material 22 and dividing the set analysis region into a plurality of thinly divided regions 25, a step for selecting and setting a thinly divided region 26 including the sample from the divided, thinly divided regions, a step for performing a successive analysis measurement for the thinly divided region being selected and set, and a step for joining analysis results being obtained from each thinly divided region.;COPYRIGHT: (C)2000,JPO