MOLD OR MOLD MASTER FOR MICRO-STRUCTURE ARRAY AND PRODUCTION THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a mold or mold master reducing the in-plane distribution of the sizes of respective micro-structures, easy to produce and capable of easily fabricating a relatively inexpensive micro-structure array having a relatively large radius of curvature. SOLUTION: A method for producing a mold or mold master for a micro- structure array such as a microlens array has a process for forming an insulating mask layer 3 on the conductive part 2 of a substrate 1, a process forming a plurality of opening parts 4 having a proper shape to the mask layer 3 to expose the conductive part 2, a process forming an electrodeposition or electroplating layer 5 on the opening parts 4 and the mask layer 3 through the opening parts 4 by applying electrodeposition or electroplating to the conductive part 2 and a process forming an electroless plating layer 6 on the electrodeposition or electroplating layer 5 by electroless plating.