MOIRE MEASUREMENT METHOD AND MOIRE MEASUREMENT DEVICE USING IT

摘要

PROBLEM TO BE SOLVED: To measure a shape of an object to be measured with high precision by virtually generating a moire fringe from a virtual image data and a measured image data to digitalize a moire fringe.;SOLUTION: An interference fringe including a light wave surface data of a object to be measured is fetched from a CCD camera 10 as a measured image data and converted into a digital data by a captured board 11. The image data fetched into the board 11 and a virtual image data of an initial phase written in a frame 14 are calculated with multipliers 18a-18c. The calculation generates a kind of moire fringe with a low space frequency and a carrier in the horizontal direction at the same time. If just a carrier component is cut off with a digital low path filter 19a-19c, just a sharpened moire fringe with a low space frequency that is generated with an electronic moire is observed with a monitor 16.;COPYRIGHT: (C)2000,JPO