Moire measuring method and the moire measurement equipment null which uses

摘要

PROBLEM TO BE SOLVED: To measure a shape of an object to be measured with high precision by using convolutional integration as a filtering method for removing a carrier component in a moire fringe.;SOLUTION: As an object to be measured is an aspherical shape in a virtual screen data determined by a virtual interference fringe calculator 13, a space frequency of a carrier component has a band width. An interference fringe including a light wave surface data is fetched from a CCD camera 10 as a measured image data and converted into a digital data by a capture board 11. The measured image data fetched into the board 11 and a virtual image data of an initial phase written in a frame memory 14 are multiplied by a multiplier 18. A kind of moire fringe with a low space frequency that means an error shape of the object to be measured and a high carrier with high frequency is generated by this calculation. If a carrier component is cut off with a convolutional integrator 19 being a filtering function, a sharpened moire fringe with the low space frequency generated by an electronic moire can be obtained.;COPYRIGHT: (C)2000,JPO