VISUAL OBSERVATION APPARATUS AND VISUAL/MICROSCOPIC OBSERVATION APPARATUS USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a visual observation apparatus, capable of positioning a desired place of the defect part or the like of a transparent sample into the visual field of a microscope in an extremely easy and accurate manner, not only for reducing the load of an operator but also for enhancing workability to a large extent and a visual/microscopic observation apparatus using the same. ;SOLUTION: A visual observation apparatus is equipped with a sample placing stand 21 comprising a flat panel display capable of displaying index and placing a transparent sample to visually observe the same, an illumination means 26 irradiating the surface of the sample placed on the sample placing stand 21 with visual observing illumination light, a display control means displaying an index to the position corresponding to the predetermined position on the surface of the sample, and a memory means for storing coordinates index displayed by the display control means.;COPYRIGHT: (C)1999,JPO