AUTOMATIC SEQUENCE PERFORMANCE OF FIB OPERATION

摘要

PROBLEM TO BE SOLVED: To completely automate the motion of an FIB milling system for modifying a semiconductor device. ;SOLUTION: A focused ion beam(FIB) is given to a forming body of a semiconductor device to be treated 1710. A raw detector signal is generated by detecting secondary electrons generated in case that the focused ion beam is given to the forming body 1720. The raw detector signal is compared with a reference trace having a region showing a forecasted material boundary and having a stop marker in the region 1730. In case that the raw detector signal shows a characteristic corresponding to the region of the reference trace, FIB operation is finished or changed 1740.;COPYRIGHT: (C)2000,JPO