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DEVICE FOR MAINTAINING TARGET SEPARATING DISTANCE BETWEEN OBJECT OF MAIN OPTICAL SYSTEM AND OPTICAL OUTPUT STAGE AND MAINTAINING METHOD
DEVICE FOR MAINTAINING TARGET SEPARATING DISTANCE BETWEEN OBJECT OF MAIN OPTICAL SYSTEM AND OPTICAL OUTPUT STAGE AND MAINTAINING METHOD
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机译:维持主要光学系统的对象与光学输出阶段之间的目标分离距离的装置及维护方法
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摘要
PROBLEM TO BE SOLVED: To provide a device for an automatic focusing system to detect zero by receiving a control signal from a loop for control and moving an optical output stage so as to maintain the target separating distance between an object and the optical output stage.;SOLUTION: A device is provided with laser sources 4 and 13 to generate incident laser beams and a pair of optical elements to be mounted to both sides of an optical output stage. The first optical element among the pair of optical elements deflects a laser beam toward an object. The object to reflect an incident beam forms a beam to be reflected backward toward the optical output stage. In addition, the second optical element deflects the reflected beam. Furthermore, a high-sensitivity location detector 16 receives the reflected beam at its input surface to obtain a representative output signal of the location of the reflected beam. Then a loop 7 for control interprets an output signal generated by the high-sensitivity location detector 16 and outputs a corresponding control signal. The control signal is computed by such a method as to make the difference zero between the target separating distance between the object and the optical output stage and the actual separating distance measured by the high-sensitivity location datector 16.;COPYRIGHT: (C)2000,JPO
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