X-RAY INCIDENT ANGLE SETTING METHOD IN PHOTOELECTRON SPECTROSCOPE, AND PHOTOELECTRON SPECTROSCOPE

摘要

PROBLEM TO BE SOLVED: To set an X-ray incident angle to a total reflection critical angle within a short time.;SOLUTION: An photoelectron and a secondary electron are emitted from a sample 7 by X-ray irradiation, and the secondary electron is detected by a secondary electron detector 15. A detected secondary electron signal therein is fed to a voltmeter 17 via an amplifier 16 to display in the voltmeter 17 as a voltage value an amount of the secondary electron emitted from the sample 7. An operator controls an inclination adjusting means 11 while watching the voltage value displayed in the voltmeter 17, and controls the means 11 to maximize the voltage value, i.e., to maximize the emitted amount of the secondary electron. A tilt stage 10 stops by this control in a position where an X-ray incident angle gets consistent with a total reflection critical angle.;COPYRIGHT: (C)2000,JPO