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film manner and film device null from the sheet metal surface in after

机译:薄膜方式和薄膜装置在之后从钣金表面消失

摘要

PURPOSE: To prevent local browning of a metallic thin sheet at the time of releasing a resist film from the thin sheet after etching by positively polarizing the thin sheet in potential in a release soln. under specified conditions. ;CONSTITUTION: A continuous long-sized metallic thin sheet 10 (aperture grill sheet, etc.) coated with a resist film of desired pattern is introduced into a release soln. 18 in a film releasing tank 20, a voltage is impressed between the sheet 10 and a counter electrode 24 from an external DC power source 28, and the resist film is released. At this time, the potential between the sheet 10 and a reference electrode 22 is measured at any time by a potentiometer 26, and the sheet 10 is positively polarized with the boundary potential between the alkaline corrosion region and passive region toward the passive region. Consequently, a passive film is formed on the sheet 10 surface to protect the surface, and local browning of the sheet is prevented.;COPYRIGHT: (C)1994,JPO&Japio
机译:目的:通过在释放溶液中使薄片正极化,以防止蚀刻后从薄片上释放抗蚀剂膜时金属薄片发生局部褐变。在指定条件下。组成:将涂覆有所需图案的抗蚀剂膜的连续的长尺寸金属薄板10(气孔格栅板等)引入脱模溶液中。如图18所示,在膜释放槽20中,从外部DC电源28在片10和对电极24之间施加电压,并且释放抗蚀剂膜。此时,通过电位计26随时测量薄片10和参考电极22之间的电势,并且薄片10以碱性腐蚀区域和被动区域之间的边界电势朝着被动区域正极化。因此,在片材10的表面上形成钝化膜以保护该表面,并且防止了片材的局部褐变。;版权所有:(C)1994,JPO&Japio

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