首页>
外国专利>
REMOTE EXPOSURE OF WORKPIECES USING A ONE ATMOSPHERE UNIFORM GLOW DISCHARGE PLASMA
REMOTE EXPOSURE OF WORKPIECES USING A ONE ATMOSPHERE UNIFORM GLOW DISCHARGE PLASMA
展开▼
机译:使用一个大气均匀辉光放电等离子体对工件进行远程曝光
展开▼
页面导航
摘要
著录项
相似文献
摘要
An OAUGD plasma is generated using, for example, paraelectric or peristaltic electohydrodynamic (EHD) techniques, in the plasma generator of a remote-exposure reactor, wherein one or more active species, especially oxidizing species in the plasma are convected away from the plasma-generation region and directed towards a workpiece that is located outside of the plasma-generation region (e.g., within an optional remote-exposure chamber configured to the plasma generator). In this way, the workpiece can be subjected to the one or more active species without directly being subjected to either the plasma or to the electric fields used to generate the plasma. The plasma generator may have a set of flat panels arranged within an air baffle to convect the active species in a serpentine manner through the plasma generator. The remote-exposure reactor can also be configured as a portable backpack unit with tubing that is used to direct the active species onto the workpiece, rather than placing the workpiece within a remote-exposure chamber of the reactor.
展开▼