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Process to produce silicon single crystal and heating apparatus for this process
Process to produce silicon single crystal and heating apparatus for this process
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机译:生产单晶硅的方法和用于该方法的加热装置
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摘要
In the production of a silicon single crystal by pulling from a silicon melt in a quartz crucible, energy is supplied at least partially inductively by a spiral heater positioned below the crucible. Also claimed is a heater in the form of a wound spiral for heating a silicon-filled crucible, the spiral windings preferably being fixed on a bottom plate below the crucible by an electrically insulating material, preferably boron nitride.
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