Autosampler system and its control method in manufacturing process of semiconductor device

摘要

The present invention relates to an autosampler system and a control method thereof according to the manufacture of a semiconductor device.;The autosampler system of the present invention includes an autosampler; Control means capable of receiving data of the capacities of the solvent and the solute supplied to the autosampler to make data; And display means for displaying data fed back to the control means.;The control method of an autosampler of the present invention includes: an input step of setting and inputting a capacity to an autosampler; A comparison step of receiving feedback of the capacity accommodated in the autosampler and comparing the capacity with the set capacity; A control step of controlling the capacity of the solvent and the solute accommodated in the autosampler when the amount of the solvent and the solute exceeds the allowable range of the set capacity by performing the comparing step; And a display step of displaying the set capacity and the fed back capacity by performing the comparing step.;Therefore, by diluting to an accurate capacity, the reliability of the data of quantitative analysis of organic materials used in the manufacture of semiconductor devices can be improved.