Ion source head cooling system of ion implanter

摘要

An inert gas such as N ₂ or Ar is used as a cooling catalyst to rapidly cool the ion source head that generates the ion beam of the ion implanter.;The inert gas is filtered by a filter in the cooling catalyst feeder, the pressure is controlled in the pressure regulator, and the cooling catalyst released from the cooling catalyst feeder is injected into the ion source head assembly according to the degree of vacuum of the ion source head assembly, The ion source can be cooled at high speed without damaging the head assembly and pumping equipment.