METHOD AND APPARATUS FOR MEASURING COPLANARITY IN A BGA SEMICONDUCTOR

摘要

The present invention relates to an apparatus and method for measuring coplanarity of a ball lattice array semiconductor device, particularly comprising: a table on which a semiconductor device is mounted; A table driver which moves the table to a predetermined position according to an input control signal; A ball height detector configured to detect a plurality of ball heights formed in a lattice arrangement on a semiconductor device mounted on the table; The vertex data of each ball is obtained from the height data of each ball measured by the ball height detector, and then divided into a set data area, the largest point of each data area is selected to form a layout surface, and then the distances from the remaining points are compared. And a computer for outputting a coplanarity value having the largest distance difference, and a video monitor for displaying the signal output from the computer to the outside.;Therefore, the present invention can minimize the coplanarity measurement error rate since the coplanarity of the ball grid array semiconductor device can be measured with a line laser sensor before the semiconductor device is mounted on the printed circuit board. Prevent product defects in advance.