PROCESS FOR PRODUCING (BARIUM, STRONTIUM) TITANIUM TRIOXIDE THIN FILM

摘要

PURPOSE: A process for producing a (Ba, Sr)TiO3 thin film using specified Ba, Sr and Ti compounds as a precursor is provided which can obtain a thin film that generates no intermolecular clustering and has a reduced carbon content in a deposited thin film. CONSTITUTION: The process comprises (a) dissolving a barium compound of the formula 1,a strontium compound of the formula 2 and a titanium compound of the formula 3 in an alcohol solvent at a mole ratio of 1-x : x : 1+y (x is greater than or equal 0 less than or equal 1, y is greater than or equal 0) and contacting with a base plate with oxidative gas. A deposition process can be carried out at a temperature of 300 to 650C.