METHOD FOR MANUFACTURING FERROELECTRIC CAPACITOR CAPABLE OF PREVENTING DEGRADATION OF CHARACTERISTIC OF ELECTRODE CAUSED BY HIGH TEMPERATURE THERMAL TREATMENT

摘要

PURPOSE: A method for manufacturing a ferroelectric capacitor is provided to prevent degradation of a characteristic of an electrode, caused by high temperature thermal treatment, by growing a ferroelectric layer in an epitaxial direction on a storage electrode. CONSTITUTION: A method for manufacturing a ferroelectric capacitor comprises the steps of growing a first oxidation electrode which will form a storage electrode of the capacitor, in an epitaxial direction; forming a ferroelectric layer on the first oxidation electrode in the epitaxial direction; and forming a second oxidation electrode which forms a plate electrode of the capacitor on the ferroelectric layer.