APPARATUS AND METHOD FOR MEASURING THRESHOLD SIZE BY USING ILLIPSOMETRIC

摘要

PURPOSE: An apparatus and a method for measuring threshold size by using illipsometric is provided to perform the measure without charge causing pollution of a sample to be measured and perform the measuring on a structural assembly, thereby improving statistic measured values. CONSTITUTION: A method for measuring threshold size by using illipsometric includes the steps of providing a surface having a surface fetcher, radiating a light beam having a first polarized light to the surface fetcher, measuring a polarized light of a light reflected by the surface fetcher, rotating the surface fetcher by rotating the surface for measuring the polarized light of the reflected light at at least one new rotated position, and correlating the polarized light of the reflected light with relation to a size of the surface fetcher.