首页> 外国专利> METHOD FOR EXTENDING LIFE SPAN OF POLYMERIC COMPONENT USED IN RADIATION ATMOSPHERE BY DLC THIN FILM DEPOSITION AND EFFICACY THEREOF

METHOD FOR EXTENDING LIFE SPAN OF POLYMERIC COMPONENT USED IN RADIATION ATMOSPHERE BY DLC THIN FILM DEPOSITION AND EFFICACY THEREOF

机译:DLC薄膜沉积延长辐射大气中聚合物成分寿命的方法及其功效

摘要

PURPOSE: A method for extending a life span of a polymeric component and an efficacy thereof are provided to decrease the radiation-induced oxidative degradation speed of the polymeric component by depositing a DLC(diamond-like carbon) thin film employing a plasma-enhanced chemical vapor deposition method on the surface thereof. CONSTITUTION: A device is composed of a reactor(1), an RF(radio frequency) matching unit(2), an RF generator(3), a vacuum pump(4), a manometer(5), N2, CH4, CO2 gas cylinders(6,7,8), a flow meter(9), gas mixer(10), a DC(direct current) voltage meter(11) and an RF(radio frequency) power meter(12). Herein, a DLC(diamond-like carbon) thin film is deposited on a polymeric component utilizing a plasma-enhanced chemical vapor deposition method. A radiation oxidative resistance is increased by a DLC thin film layer. Thus, the radiation-induced oxidative degradation speed of the polymeric material is decreased.
机译:目的:提供一种用于延长聚合物部件的寿命的方法及其功效,该方法通过使用等离子体增强化学物质沉积DLC(类金刚石碳)薄膜来降低聚合物引起的辐射诱导的氧化降解速度。在其表面上进行气相沉积的方法。组成:一种设备由电抗器(1),RF(射频)匹配单元(2),RF发生器(3),真空泵(4),压力计(5),N2,CH4,CO2组成气瓶(6,7,8),流量计(9),气体混合器(10),DC(直流)电压表(11)和RF(射频)功率计(12)。在此,利用等离子体增强化学气相沉积法将DLC(类金刚石碳)薄膜沉积在聚合物部件上。 DLC薄膜层提高了放射线的抗氧化性。因此,降低了聚合物材料的辐射诱导的氧化降解速度。

著录项

  • 公开/公告号KR20000059452A

    专利类型

  • 公开/公告日2000-10-05

    原文格式PDF

  • 申请/专利权人 KOREA ATOMIC ENERGY RESEARCH INSTITUTE;

    申请/专利号KR19990007066

  • 发明设计人 PARK GWANG JUN;

    申请日1999-03-04

  • 分类号C23C16/50;

  • 国家 KR

  • 入库时间 2022-08-22 01:45:15

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