FABRICATION METHOD OF LIMN2O4 THIN FILM ELECTRODE FOR MICROBATTERY

摘要

PURPOSE: A lithium manganese oxide thin film cell is provided for an easier control over properties of the thin film including composition ratio, surface characteristics, and density, thereby improving a product quality and utilizing additives. CONSTITUTION: The method for manufacturing a lithium manganese oxide thin film for a thin film secondary battery comprises preparing a source by dissolving manganese acetylacetonate and lithium acetylacetonate in a solvent, the solvent being the mixture of 1-butanol and acetic acid, and drying the solution for addition as a thin film at 230-500 deg.C for 1 minute to 1 hour using a spin coater. The thin film is then thermally treated in a Rapid Thermal Annealing(RTA) system using a halogen lamp at 650-800 deg.C for 1 minute to 1 hour.