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Micro-displacement measuring device using laser

机译:利用激光的微位移测量装置

摘要

The objective of the present invention is to provide an objective lens which has a pinhole at an output end to which light is irradiated for irradiating a displacement to which a phase is slightly moved and is provided with a laser for irradiating light through the pinhole, A driving inspection body for adjusting the degree of diffraction of light passing through the lens and a telescope for observing the light passing through the objective lens can be optically inspected with the driving characteristics of two axes, And more particularly, to a micro displacement measurement apparatus using a laser which is easy to configure and improved in productivity.
机译:本发明的目的是提供一种物镜,该物镜在输出端具有针孔,该光被照射以照射相位稍微移动的位移,并且设有用于通过针孔A照射光的激光器。可以利用两个轴的驱动特性对用于调节通过透镜的光的衍射程度的驱动检查体和用于观察通过物镜的望远镜进行光学检查,尤其是对于使用易于配置并提高生产率的激光器。

著录项

  • 公开/公告号KR20000003412U

    专利类型

  • 公开/公告日2000-02-15

    原文格式PDF

  • 申请/专利权人 윤종용;

    申请/专利号KR19980013568U

  • 发明设计人 박경희;

    申请日1998-07-23

  • 分类号G01B11/02;

  • 国家 KR

  • 入库时间 2022-08-22 01:43:46

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