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Micro-displacement measuring device using laser
Micro-displacement measuring device using laser
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机译:利用激光的微位移测量装置
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摘要
The objective of the present invention is to provide an objective lens which has a pinhole at an output end to which light is irradiated for irradiating a displacement to which a phase is slightly moved and is provided with a laser for irradiating light through the pinhole, A driving inspection body for adjusting the degree of diffraction of light passing through the lens and a telescope for observing the light passing through the objective lens can be optically inspected with the driving characteristics of two axes, And more particularly, to a micro displacement measurement apparatus using a laser which is easy to configure and improved in productivity.
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