Planar electrochemical sensor element, e.g. for studying cell growth in biological systems or in small caliber flow-through systems

摘要

The electrochemical sensor element has planar half-cells comprising precious metal functional layers (2) chemically deposited on nickel-phosphorus coatings (5) on a dielectric substrate (1). The sensor element for electrochemical measurements has one or more planar half-cells which are located on a dielectric (preferably oxide-ceramic or glass) substrate (1) and which comprise metallic functional layers (2) and optionally overlying metallic or nonmetallic layers (3), each half-cell being connected to a conductor line (4) of the same metal as the lowermost metal layer. The metal layers comprise 1-10 mu m thick precious metal (alloy) layers chemically deposited on nickel-phosphorus coatings (5), whereby various chemically deposited metal layers can be provided on a substrate. An Independent claim is also included for the production of the above sensor element in which a dielectric substrate is cleaned and then subjected to a lithographic process for forming a negative image of the sensor element structure.