Characterization of mechanical strain conditions in planar materials; involves using capacitive measuring system comprising substrate plate and baseplate with one or more electrodes

摘要

The method involves using a capacitive system with a freely located substrate plate (1). The sample (P) to be tested is fixed on the substrate plate, so that it transmits inherent stresses of the measurement sample on the substrate, to produce deformations, which are measured from the capacitance alterations of the electrodes of a baseplate (2) of the system. The mechanical stress of the sample is determined from the capacitance alteration, the elastic constants, the geometry of the substrate plate and the sample thickness.