Ceramic substrate, especially for polysilicon deposition for solar cells, has a deposition surface of mainly a nucleation-inhibiting component locally or completely surrounding a nucleation-promoting component

摘要

A ceramic support, having a polycrystalline semiconductor layer deposition face composed of mainly a nucleation-inhibiting component locally or completely surrounding a nucleation-promoting component, is new. An Independent claim is also included for production of the above ceramic substrate. Preferred Features: The substrate consists of an aluminum oxide ceramic. The nucleation-inhibiting component comprises MgO in an oxide ceramic, Y2O3 in a nitride ceramic or carbon in a carbide ceramic and the nucleation-promoting component comprises crystalline silicon particles especially in a glaze layer.