Membrane pressure sensor has coupling elements between membrane and deformable element and between membrane frame and deformable element provided by support profiles of material with same expansion coefficient

摘要

The pressure sensor has a membrane (1) supported within a frame (3) for deflection in a given direction (z) in response to applied pressure. Deflection is detected via a deformable element (2) extending in a direction (y) parallel to the plane of the membrane and coupled to the membrane and the frame via respective coupling elements (101,102), provided by profiles made of a material with the same thermal expansion coefficient, having same height and width. Each profile is only flexible in its thickness direction.