Continuous combustible metallurgical dust passivation, especially in Czochralski silicon single crystal growth units, comprises controlled dust oxidation in off-gas stream

摘要

Continuous combustible metallurgical dust passivation comprises the use of a reactive gas in the off-gas stream of a crucible growth unit. Combustible metallurgical dusts, arising in the off-gas filters of crucible growth units, are continuously passivated in the off-gas stream by a reactive gas at 50-500 deg C. An Independent claim is also included for an oxidation unit for carrying out the above process, comprising a reaction chamber (4) with a heater (5), a reactive gas inlet (6) and a control unit (3) which regulates the chamber temperature and the reactive gas supply in accordance with the drawing conditions. Preferred Features: The off-gas stream, entering the reaction chamber, is mixed with the reactive gas by a mixing device (7).