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Device for measuring substrate temperature has polygonal stop with essentially straight edges between substrate, radiation detector to restrict detector field of view
Device for measuring substrate temperature has polygonal stop with essentially straight edges between substrate, radiation detector to restrict detector field of view
The device has at least one radiation detector for measuring the radiation emitted by the substrate and a stop (19) for restricting the field of view of the detector arranged between the substrate and detector, whereby the edges (20) of the stop are essentially straight. A polygonal stop is used.
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