On a substrate layer sequence, which is built up in thin-film technology

摘要

On a substrate (1), which is built up layer sequence in thin layer technology, with a sputtered, electrical conductive layer which, by means of a likewise electrically conductive reinforcing layer (15) is reinforced with another method is applied on top of the conducting layer. Dollars a so that during the removal of conductor material with the aid of a laser as little as possible for adjustment purposes, contamination by the removed material is used, the conductive layer in a balancing area (16, 17) have a smaller or not at all through the reinforcing layer (15) is reinforced.