Sensor, for measuring pressure, flow, force or pressure-dependent parameters, has a cavity of cross-sectional contour which includes inwardly offset line sections in the regions of transducer elements

摘要

A sensor structure, comprising a cavity of cross-sectional contour including inwardly offset line sections (5a-d) in the regions of transducer elements, is new. A sensor structure comprises a substrate consisting of one or more first layers bonded to a second layer, a cavity formed by the structured substrate and/or second layer and one or more transducer elements located on or in the second layer for detecting bending or mechanical stress of the second layer. The cross-sectional contour of the cavity is formed by one or more spaced-apart first line sections (5a-d) which do not contact the outer contour envelope and which are connected by one or more second line sections (6a-d) to form a continuous line, the or each transducer element being located in the region of a first line section. An Independent claim is also included for production of the above sensor structure.