Scanning probe microscope for imaging sample surface; has feedback loop to generate drive signal for controlling probe and imaging device that uses probe signal, drive signal and relation between two signals

摘要

The microscope has a measurement device (2,4,4a,4b,5,6,10,17) to generate a probe signal (Vc) according to interactions between a probe (1) and a sample (3) surface (3a). A control device (8) holds the interaction constant according to a drive signal (Vp) generated by a feedback loop between the measurement device and the control device. A memory device stores a relation between the probe and drive signals. A visualization device connected to the feedback loop, the measurement device and the memory device generates an image of the surface topography, through selective use of the probe signal, the drive signal, and the relation between the two. Independent claims are included for a method to control the microscope, a signal processing system and a method to control the signal processing system.