Animal oriented swellable material, oriented animal is located, the substrate and the surface wave arrangement

摘要

PURPOSE: To obtain a ZnO film with excellent crystalinity and less unevenness and to obtain the orientated substrate having a lamination structure suitable for an element when various devices are manufactured. ;CONSTITUTION: The substrate is an orientated substrate having a lamination structure comprising a diamond layer and a ZnO film arranged on a face having the (111) orientation of a diamond. The surface acoustic wave element is formed by arranging an interdigital electrode onto the ZnO film of the substrate or between the ZnO film and a diamond. Since the ZnO film or the like having a function as a piezoelectric body is formed on a face having the (111) orientation of a diamond (single crystal or poly crystal), higher c-axis orientation is obtained in comparison with forming a film of the same material onto a face of other orientation.;COPYRIGHT: (C)1995,JPO