Robust search for image features across image sequences exhibiting non- uniform changes in brightness

摘要

An apparatus and method for two-dimensional search for a model image within atest image that exploits edge-based matching of edge maps, followed by area-based matching of at least coarse resolution edge maps of respective multi-resolution edge-maps, to efficiently and accurately provide the position of at least one instance of the model image. The invention can find a location of the model image within each test image of a sequence of test images, even when there are non-uniform brightness changes in the test image due to process steps or lighting changes. The postion of each verified instance of the model image within the test image can be provided to an alignment device, a measurement device, or any other device that can use such position information.