首页> 外国专利> Apparatus for microindentation hardness testing and surface imaging incorporating a multi-plate capacitor system

Apparatus for microindentation hardness testing and surface imaging incorporating a multi-plate capacitor system

机译:用于微压痕硬度测试和表面成像的设备,包含多板电容器系统

摘要

A force, weight or position sensor unit and sensor element incorporated into an apparatus for microindentation hardness testing and surface imaging which allows immediate imaging of the surface subsequent to hardness testing. The sensor uses a multi-capacitor system having drive and pick-up plates mounted on an appropriate suspension system to provide the desired relative motion when a force is applied to the pick- up plate. The output signal is run through a buffer amplifier and synchronously demodulated to produce a signal proportional to force or displacement. The sensor element is mounted on a scanning tunneling microscope base and a sample mounted on the sensor. The force sensor is used for both measuring the applied force during microindentation or micro hardness testing and for imaging before and after the testing to achieve an atomic force microscope type image of the surface topography before and after indentation testing.
机译:力,重量或位置传感器单元和传感器元件并入用于微压痕硬度测试和表面成像的设备中,该设备可在硬度测试后立即对表面进行成像。该传感器使用多电容器系统,该系统具有安装在适当的悬挂系统上的驱动板和拾取板,以在将力施加到拾取板时提供所需的相对运动。输出信号通过缓冲放大器运行,并被同步解调以产生与力或位移成比例的信号。传感器元件安装在扫描隧道显微镜基座上,样品安装在传感器上。力传感器既用于测量微压痕或显微硬度测试期间的作用力,又用于测试之前和之后的成像,以在压痕测试之前和之后获得表面形貌的原子力显微镜型图像。

著录项

  • 公开/公告号US6026677A

    专利类型

  • 公开/公告日2000-02-22

    原文格式PDF

  • 申请/专利权人 HYSITRON INCORPORATED;

    申请/专利号US19970965332

  • 发明设计人 WAYNE A. BONIN;

    申请日1997-11-06

  • 分类号G01B5/28;G01N3/42;

  • 国家 US

  • 入库时间 2022-08-22 01:37:51

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