Liquid crystal display having an active matrix substrate with thermosetting inter-layer insulating film with a thickness of greater than 2 amp;mgr;M

摘要

In the fabrication of an active matrix substrate, when forming a contact hole in an inter-layer insulating film made of a thermosetting resin and hardening the inter-layer insulating film by heat, the temperature gradient in raising the temperature from room temperature to a baking temperature is arranged to be larger than 10° C./minute. As a result, the tilt angle of the slant face of the contact hole is controlled to be within a range of 45° to 60°.