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Silicon-system thin film, photovoltaic device, method for forming silicon- system thin film, and method for producing photovoltaic device
Silicon-system thin film, photovoltaic device, method for forming silicon- system thin film, and method for producing photovoltaic device
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机译:硅系薄膜,光伏器件,形成硅系薄膜的方法以及制造光伏器件的方法
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摘要
This invention provides a silicon-system thin film, characterized by containing at least 1 ppm of phosphorus atoms and diffraction intensity at the (220) plane with X ray or electron beams of at least 30% of total diffraction intensity, photovoltaic device that contains the silicon- system thin film, and methods for forming the silicon-system thin film and photovoltaic device. These methods give the silicon-system thin film and photovoltaic device of high photoelectric conversion efficiency at a high film-making rate.
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