Particle quantitative evaluation device and dipping type cleaning system and particle deposit evaluation method

摘要

PROBLEM TO BE SOLVED: To realize quantitative evaluation of actual particle-stuck quantity in liquid with high accuracy and washing degree evaluation with low cost and high reliability without using a monitor substrate.;SOLUTION: This device is provided with a residual liquid recovering pan 12 for recovering residual liquid, and a residual liquid quantitative measuring tank 13 for in-liquid particle measurement are installed between a first substrate treating tank 20A and a second substrate treating tank 20B. The residual liquid dropped from a substrate 60, when the substrate 60 is conveyed from the first substrate treating tank 20A to the second substrate treating tank 20B by using a substrate conveying means 50, is recovered by a residual liquid recovering pan 12 and the residual liquid quantitative measuring tank 13 to form sample liquid. The sample liquid is diluted with pure water from a pure water supply source 30 in a pure water quantitative tank 14 by a fixed quantity for measuring by an in-liquid particle measuring instrument 40.;COPYRIGHT: (C)2000,JPO