Minute hole generation method null of minute diameter electronic beam sensor and anode

摘要

PROBLEM TO BE SOLVED: To provide a micro-diameter electron beam sensor to perform measure ment of the electron beam current optimum for measuring the distribution of the electron current density. ;SOLUTION: This device comprises an anode electrode 10 having a relatively large micro-hole 12 in the surface mating with a cathode and another anode electrode 20 having a relatively small micro-hole 22 between the anode electrode 10 and a Faraday cage 42. The current of electron beam in the whole specimen element is measured by the anode electrode 20 while a micro-diameter electron beam sensor 2 is moved for a distance corresponding to the diameter of the hole 12. If the picture element in the specimen element to be further measured is decided on the basis of the result from measurement, the sensor 2 is moved to that picture element, and the current of electron beam in the whole picture element is measured by the Faraday cage 42 while the sensor is moved for a distance corresponding to the diameter of the hole 22 of the anode electrode. In this manner, measurement of the current of electron beam is conducted in stepwise.;COPYRIGHT: (C)1999,JPO