LASER BEAM MACHINE FOR MINUTE HOLE DRILLING IN GLASS AND MINUTE HOLE DRILLING METHOD IN GLASS

摘要

PROBLEM TO BE SOLVED: To achieve improvement of productivity, and cut down cost as well.;SOLUTION: A laser beam machine is equipped with a stage pedestal 27 for mounting glass 28 being an object to be worked; a laser oscillator 21 for oscillating a laser beam 22; a beam-conditioning optical system 23 for conditioning the size of a beam diameter and a beam shape of the oscillated laser beam 22; a light guiding mirror 24 for conditioning the traveling direction of the laser beam 22 after the conditioning toward the glass 28; a mask 25 for forming the light-guided laser beam 22; and a condenser lens 26 for condensing the formed laser beam 22 on a laser beam incidence plane of the glass 28. The pulse width of the laser beam 22 is adjusted to 5μs or less.;COPYRIGHT: (C)2014,JPO&INPIT