The secondary charged particle analytical device, and uses that the sample analytical manner

摘要

PURPOSE:To improve resolution and sensitivity by correcting the orbit of secondary charged particles generated from an object under test with an accelerating lens formed inside. CONSTITUTION:1.5kV and 2.0kV are applied to electrodes 9a and 9b by adjusting variable power sources 21c and 21b respectively. The power source of the electrode 9a is set to 1.5kV, the potential difference from the potential of an extracting electrode 8 is reduced, the focal distance of an accelerating lens 32 is made long, thereby no convergent point is formed between the accelerating lens 32 and a focusing lens 33, and adjacent secondary ion beams 2b passing through the electrode 9a become nearly parallel beams with each other. The incidence angle of all secondary ion beams 2b into the focusing lens 33 can be reduced, as a result an image can be sufficiently formed at a slit 5b with a weak focusing lens, the outgoing angle to a secondary charged particle analyzing system and dispersion are reduced, thus analysis results with high resolution and high sensitivity can be obtained.